TRANSPARENT PLASMA CRUCIBLE Russian patent published in 2015 - IPC H01J65/04 

FIELD: electricity.

SUBSTANCE: invention relates to plasma equipment. The transparent plasma crucible is made from quartz with the sizes providing the following properties: low order mode of transversal electric microwaves or low order mode of transversal magnetic microwaves, and the diameter (d) (cm), the length (l) (cm) and the working frequency (f) (MHz) are in the following ratio: the square of the diameter divided by the length (d/l)² is ranging from 0 to 100 and the square of the diameter multiplied by the frequency (d×f)² is ranging from 0 to 2×10⁹. The sealed plasma cavity is located along the centre on the central axis, with the passage for the antenna at one edge, but shifted with reference to the central axis of the crucible and located close to the central cavity.

EFFECT: increase of intensity of electric field in a crucible.

13 cl, 2 tbl, 5 dwg