MODULAR PRECIPITATION REACTOR USING MICROWAVE PLASMA Russian patent published in 2020 - IPC C23C16/27 C23C16/458 C23C16/54 

FIELD: technological processes.

SUBSTANCE: disclosed group of inventions relates to a modular reactor for making synthetic diamonds by deposition in a microwave plasma and to a method of producing synthetic diamonds using said reactor. Said reactor comprises a microwave generator configured to generate microwaves with a frequency within range of 300 MHz to 3000 MHz, resonator cavity formed at least partially by cylindrical inner walls of reactor chamber, gas supply system and gas outlet module, a wave communication module configured to transmit microwaves from the microwave generator to the resonator cavity to enable formation of a plasma, and a growth substrate in the resonator cavity. Said modular reactor comprises at least three modular elements selected from the following elements: at least one rim for changing the shape and/or volume of the resonator cavity, module of substrate holder with possibility of vertical movement and rotation in contact with quarter-wave metal structure and containing at least one cooling system with fluid medium, plates for change of shape and volume of resonator cavity, gas-distributing module and module of control of substrate cooling.

EFFECT: possibility of creating a modular reactor having several configurations for optimizing the expected result of diamond growth, and controlling local growth conditions on the surface of the growing diamond with varying different growth conditions of the diamond.

18 cl, 12 dwg