POLISHING ETCH COMPOSITION FOR MERCURY CADMIUM TELLURIDE Russian patent published in 2015 - IPC C23F1/00 C23F3/00 H01L21/306 

Abstract RU 2542894 C1

FIELD: chemistry.

SUBSTANCE: polishing etch composition for mercury cadmium telluride contains the ingredients in the following proportions, volume fractions: methanol (95%) - 5, ethylene glycol - 13, hydrobromic acid (47%) - 2, hydrogen peroxide (30%) - 1. The presented composition provides polishing etching at max. 0.75 mcm/min and enables generating a highest possible quality (no more than 2 nm) mercury cadmium telluride surface.

EFFECT: enhanced characteristics.

4 dwg, 1 tbl

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RU 2 542 894 C1

Authors

Kashuba Aleksej Sergeevich

Permikina Elena Vjacheslavovna

Dates

2015-02-27Published

2013-10-25Filed