METHOD OF PRODUCING MONOPHASE INTERMETALLIC THIN FILM Russian patent published in 2015 - IPC C23C14/18 C23C14/24 C23C14/58 

Abstract RU 2553148 C1

FIELD: physics.

SUBSTANCE: invention relates to the physics of nanosized structures and particularly to a method of producing a monophase intermetallic thin film with a nanosize structure on a glass substrate, and can be used in different high-technology fields of industry and science to form nanostructured materials based on intermetallic compounds. A glass substrate in a vacuum at residual pressure of not less than 10-5 Torr is coated with at least six metal layers in the sequence Cu/Sn/Cu/Sn/Cu/Sn, each layer having thickness of 30-60 nm and a chemical reaction takes place between layers through relaxation annealing by heating in a vacuum from room temperature to 600°C at a rate of 1 degree per second to facilitate volumetric synthesis.

EFFECT: obtaining a monophase intermetallic thin film.

4 dwg, 2 tbl, 4 ex

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RU 2 553 148 C1

Authors

Plotnikov Vladimir Aleksandrovich

Makarov Sergej Viktorovich

Makrushina Anna Nikolaevna

Dates

2015-06-10Published

2013-11-28Filed