CONDUCTING THIN FILMS WITH HIGH THERMAL STABILITY Russian patent published in 2015 - IPC H01B1/16 

FIELD: metallurgy.

SUBSTANCE: invention relates to conducting thin films with high thermal stability. The conducting thin-film metal structures with the long operation temperatures 300°C and higher are of considerable practical interest in a number of applications, for example, such as elements on the surface acoustic waves (SAW). The film consists of the mix of conducting metal with high melting temperature and alloyed with aluminium, the off-stoichiometric aluminium oxides. The aluminium oxides alloyed with aluminium act as the components thermally stabilising the conducting metal film; the share of chemically available aluminium besides is able to form an alloy with the conducting metal and as a result allows to effect purposefully the essential properties of the film, for example, such as conductivity.

EFFECT: using standard materials and methods of application of thin films, it is possible to obtain by cost efficient effective method the high conducting and heat-resistant films with a good structural organisation and rather low density for the wide range of various applications.

12 cl, 3 dwg