SPRAY DEVICE Russian patent published in 2023 - IPC H01J27/04 

FIELD: spray devices.

SUBSTANCE: invention is related to devices for depositing coatings on articles in a vacuum chamber, including coatings made of ferromagnetic materials. The spray device is comprised of a flat round target, which is a glow discharge cathode, a vacuum chamber, which is the glow discharge anode, a glow discharge power source connected by a negative pole to the target, and by a positive pole to the vacuum chamber, a flat metal grid installed parallel to the sprayed target surface, and a constant voltage source, connected by a negative pole to the grid, and by a positive pole to a vacuum chamber.

EFFECT: expansion of operational capabilities by increasing the efficiency of using the target material, as well as the ability to spray targets from ferromagnetic materials.

1 cl, 1 dwg