DEVICE FOR COATING DEPOSITION Russian patent published in 2018 - IPC H01J27/04 C23C14/56 C23C14/35 C23C14/06 

FIELD: machine building.

SUBSTANCE: invention relates to engineering, in particular to devices for depositing wear-resistant coatings on products in a vacuum chamber. Device for depositing coatings on articles 3 comprises working vacuum chamber 1, targets 4–7 of planar magnetrons on the walls of the chamber, power supplies of 8–11 magnetron discharges, negative poles connected to targets, additional insulated from chamber 1 and electrode 12 and direct current source 13, connected in a negative pole to chamber 1, but a positive pole connected to electrode 12 and to the positive poles of the power supplies of the magnetron discharges.

EFFECT: improving the quality of the synthesized coating.

1 cl, 1 dwg