MAGNETRON SPRAYER Russian patent published in 2020 - IPC H01J27/04 C23C14/35 

FIELD: ion-plasma technology.

SUBSTANCE: invention relates to ion-plasma technology and can be used for deposition of coatings on articles in a vacuum. Magnetron sprayer comprises a flat round target, which is a glow discharge cathode, a magnetic system, one of the poles of which adjoins the center of the outer surface of the target, vacuum chamber, which is a glow discharge anode, and a glow discharge source connected by a negative pole to the target, and with a positive pole – with a vacuum chamber, is equipped with an enveloping target and an electrically cylindrical electrode connected to it, and the second pole of the magnetic system adjoins the outer surface of the cylindrical electrode.

EFFECT: expansion of operational capabilities due to increased efficiency of target material usage, as well as reduction of costs for production of sputtered targets.

1 cl, 1 dwg