DETECTING STRUCTURE OF THE BOLOMETER TYPE FOR DETECTING ELECTROMAGNETIC RADIATION AND THE METHOD FOR MANUFACTURING SUCH A STRUCTURE Russian patent published in 2021 - IPC G01J5/02 

Abstract RU 2752294 C2

FIELD: measuring equipment.

SUBSTANCE: detecting structure (10) of the bolometer type for detecting electromagnetic radiation is proposed. Detecting structure (10) contains MOSFET-type transistor (100) connected to the first absorbing element to detect an increase in the temperature of the specified absorbing element when absorbing electromagnetic radiation. Transistor (100) contains at least one first and at least one second zones (111, 112), at least one third zone (113) separating first and second zones (111, 112) from each other, and at least one first gate electrode (120), made with the possibility of shifting third zone (113). First gate electrode (120) contains at least one first metal section forming the first absorbing element. The first metal section has a thickness Ep satisfying the following inequality: The object of the invention is also a method for manufacturing such a structure.

EFFECT: obtaining a detecting structure for detecting electromagnetic radiation.

17 cl, 6 dwg

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RU 2 752 294 C2

Authors

Yon, Jean-Jacques

Fuxa, Etienne

Dates

2021-07-26Published

2017-09-19Filed