FIELD: measuring equipment.
SUBSTANCE: detecting structure (10) of the bolometer type for detecting electromagnetic radiation is proposed. Detecting structure (10) contains MOSFET-type transistor (100) connected to the first absorbing element to detect an increase in the temperature of the specified absorbing element when absorbing electromagnetic radiation. Transistor (100) contains at least one first and at least one second zones (111, 112), at least one third zone (113) separating first and second zones (111, 112) from each other, and at least one first gate electrode (120), made with the possibility of shifting third zone (113). First gate electrode (120) contains at least one first metal section forming the first absorbing element. The first metal section has a thickness Ep satisfying the following inequality: The object of the invention is also a method for manufacturing such a structure.
EFFECT: obtaining a detecting structure for detecting electromagnetic radiation.
17 cl, 6 dwg
Title | Year | Author | Number |
---|---|---|---|
SEMICONDUCTOR STRUCTURE AND METHOD OF ITS MANUFACTURE | 2022 |
|
RU2810689C1 |
SEMICONDUCTOR STRUCTURE AND METHOD OF ITS MANUFACTURE | 2021 |
|
RU2808084C1 |
DETECTION DEVICE, METHOD OF ITS MANUFACTURING AND DETECTION SYSTEM | 2011 |
|
RU2474922C2 |
METHOD FOR MANUFACTURING OF SUBSTRATE WITH STRUCTURE OF THIN-FILM TRANSISTORS | 2010 |
|
RU2491678C1 |
SEMICONDUCTOR RADIATION DETECTOR WITH MODIFIED INTERNAL GATE STRUCTURE | 2005 |
|
RU2376678C2 |
IMAGE CAPTURING DEVICE AND IMAGE CAPTURING SYSTEM | 2016 |
|
RU2668949C2 |
TERAHERTZ HOT ELECTRON BOLOMETER | 2021 |
|
RU2782707C1 |
METHODS OF FORMING ANTI-REFLECTION STRUCTURES FOR CMOS IMAGE SENSORS | 2009 |
|
RU2492554C2 |
METHOD FOR PRODUCING THREE-DIMENSIONAL ELECTRICITY CONDUCTING OR SEMICONDUCTING STRUCTURES AND METHODS FOR DESTROYING THEM | 1999 |
|
RU2183882C2 |
MEMORY CELL AND METHOD OF ITS MANUFACTURE, AS WELL AS STORAGE DEVICE AND METHOD OF ITS MANUFACTURE | 2022 |
|
RU2810690C1 |
Authors
Dates
2021-07-26—Published
2017-09-19—Filed