METHOD OF FORMING ACTIVE p-REGION OF SOLAR CELLS Russian patent published in 2016 - IPC H01L31/18 

FIELD: physics.

SUBSTANCE: method of forming an active p⁺-region of solar cells includes a boron diffusion process using a liquid source - boron trichloride (BCl₃). As the diffusion source a liquid source - boron trichloride (BCl₃), with the following consumption of gases: oxygen O₂=12 l/h, nitrogen N₂=380 l/h, N₂+H₂=380 l/h, BCl₃=2 l/h, 1000 ppm is used.

EFFECT: invention enables to obtain a borosilicate layer from a liquid source of boron trichloride while reducing the range of surface resistance values on a silicon wafer, reduces the temperature and duration of the process.

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