FIELD: chemistry.
SUBSTANCE: in the method, micromechanical devices are made by directly joining two parts; one of the parts (12) is made from silicon and the other from material selected from a group consisting of silicon and semiconductor ceramic or oxide material; the joint between the parts forms a cavity (14) which houses functional elements of the device (11), possible auxiliary elements and a coating (13) made from gas-absorbent material.
EFFECT: invention enables to obtain micromechanical devices in which detachment of coatings made from gas-absorbent materials on silicon substrates is prevented owing to direct bonding.
15 cl, 2 dwg
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