METHOD FOR ADJUSTMENT OF THERMALLY STABLE PRESSURE SENSOR BASED ON THIN-FILM NANO- AND MICRO-ELECTROMECHANICAL SYSTEM Russian patent published in 2016 - IPC G01L9/04 B82B3/00 

FIELD: nanotechnology.

SUBSTANCE: adjustment method for thermally stable pressure sensor based on thin-film nano-and micro-electromechanical system relates to measurement equipment and is intended for pressure measurement under action of non-steady temperature of measured medium. Method consists in introducing into a bridge measuring circuit of resistance strain gauges two compensation resistors, effect of non-steady temperature of measured medium on membrane sensor, determination of initial output signal and its change from temperature, determination of required value of resistance of compensation resistors and shorting compensation resistors to required value. First compensation resistor is placed in zone of minimum gradient temperature field at minimum possible distance from strain gauges, and second compensating resistor is placed in zone of maximum gradient of temperature field. First, required value of second compensation resistor is determined with supply voltage and effect of non-steady temperature and included in bridge measuring circuit of resistance strain gauges, and then required value of first compensation resistor is determined with supply voltage and stationary temperatures.

EFFECT: technical result is reduced error of pressure sensor.

1 cl, 3 dwg