METHOD OF ION-PLASMA SPUTTERING OF METAL CATHODE ON POLYMER FILM AND DEVICE THEREFOR Russian patent published in 2017 - IPC C23C14/06 C23C14/24 

FIELD: chemistry.

SUBSTANCE: invention relates to technology of ion-plasma sputtering and can be used for production of filter elements used in medicine, as well as chemical, metallurgical and mining industries. Method of ion-plasma sputtering a metal cathode on a polymer film includes cleaning surface of polymer film, equipment and walls of working chamber and deposition of a functional coating on said polymer film, wherein polymer film with tension is placed on outer surface of a hollow drum whose cavity is used for circulation of medium, cooling polymer film during cleaning and deposition of functional coating. Polymer film is placed on outer surface of hollow drum with tension by means of tension rods. Cleaning of polymer film, equipment and walls of working chamber is performed at discharge current 30–60 A of low-temperature argon plasma and when unwinding polymer film, wound on rotating drive rod, on other rotating drive rod through outer surface of fixed drum with permanent tension and at a rate of 1 cm/min. After complete unwinding of polymer film from one drive rod onto other, cleaning is repeated until pressure in working chamber is equal to (1–4)⋅10^-4 mm Hg, then, without switching off said plasma, an arc is ignited on consumable cathode and functional coating is applied while maintaining electric potential on drum in range from 0 to -250 V and at temperature of polymer film in range of 50 °C + 150 °C. Device for ion-plasma sputtering of metal cathode on polymer film comprises a working chamber for ion-plasma sputtering, plasma sources installed therein,a hollow metal drum arranged therein, on outer surface of which with tension a polymer film is arranged to move when cleaning its surface, equipment and walls of working chamber in medium of low-temperature argon plasma and during deposition of functional coating on polymer film, wherein polymer film moves ahead of consumable metal cathode. Device also includes two drive rods configured for rotation, on one of which is wound polymer film, and two freely rotating rods, equipped with locking device to provide for required tensioning of polymer film relative to outer surface of fixed hollow drum.

EFFECT: providing directional synthesis of functional coatings of large format, specified composition and structure with controlled content of impurities of oxygen and good adhesion.

2 cl, 1 dwg