FIELD: physics.
SUBSTANCE: invention can be used for transmitting and/or receiving ultrasonic waves by means of an ultrasonic transducer. Essence of invention consists in that ultrasonic transducer comprises at least one cMUT cell (30) for transmitting and/or receiving ultrasonic waves, wherein cMUT cell (30) comprises cell membrane (30a) and cavity (30b) underneath cell membrane. Device additionally comprises substrate (10) having first side (10a) and second side (10b), wherein at least one cMUT cell (30) is installed on first side (10a) of substrate (10). Substrate (10) comprises substrate base layer (12) and a plurality of adjacent trenches (17a) extending into substrate (10) in a direction, perpendicular to substrate sides (10a, 10b), wherein spacers (12a) are each formed between adjacent trenches (17a). Substrate (10) further comprises connecting cavity (17b) which connects trenches (17a) and which extends in a direction parallel to substrate sides (10a, 10b), trenches (17 a) and connecting cavity (17b) together forming substrate cavity (17) in substrate (10). Substrate (10) further comprises substrate membrane (23) covering substrate cavity (17). Substrate cavity (17) is located in a region of substrate (10) underneath cMUT cell (30).
EFFECT: reducing or suppressing acoustic communication of ultrasonic waves with substrate.
14 cl, 32 dwg
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