FIELD: instrument making.
SUBSTANCE: invention relates to pre-compressed cell (10) of capacitance micro-processed converter containing substrate (12) and membrane (14), covering total area (Atotal) of membrane, wherein between membrane (14) and substrate (12) there is cavity (20), membrane therein contains hole (15) and edge section (14a) surrounding hole (15). Cell (10) additionally contains stressed layer (17) on membrane (14), wherein stressed layer (17) has given value of stress relative to membrane (14), wherein stressed layer (17) is configured to provide bending moment on membrane (14) in direction to substrate (12), so that edge section 14a of membrane (14) is pressed to substrate (12). Present invention also relates to method for making such pre-compressed cell (10) of capacitance micro-processed converter.
EFFECT: technical result is providing improved pre-compressed cell of capacitance micro-processed converter and method for its production.
14 cl, 10 dwg
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