FIELD: machine building.
SUBSTANCE: present invention relates to pre-collapsed capacitive micro- machined transducer cell (10) comprising substrate (12) and membrane (14) covering total membrane area (Atotal), wherein cavity (20) is formed between membrane (14) and substrate (12), membrane (14) comprising hole (15) and edge portion (14a) surrounding hole (15), edge portion (14a) of membrane (14) being collapsed to substrate (12). Cell further comprises plug (30) arranged in hole (15) of membrane (14), plug (30) being located only in subarea (Asub) of total membrane area (Atotal). Present invention further relates to method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).
EFFECT: technical result - improved pre-collapsed capacitive micro-machined transducer cell, in particular, for high frequencies.
14 cl, 4 dwg
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