FIELD: medicine.
SUBSTANCE: invention can be used for medical diagnosis by ultrasound. Array of cMUT (capacitive micromachined ultrasonic transducer) cells is formed on individually isolated massive plates on a substrate Mass of each plate provides an inertial force in opposition to force and motion of transmission by cell which reduces resultant translation of motion in plate. Reduction in motion results in less coupling of acoustic energy into substrate and contamination of signals of adjacent cMUT cells by lateral waves. Unwanted wave coupling into substrate can be further damped by compliant or sparse periodic mounting of massive plates on substrate.
EFFECT: technical result is possibility of acoustic insulation of cMUT cells from substrate.
21 cl, 8 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| CATHETER-CONVERTER WITH ROWS OF MICROMACHINE ULTRASONIC TRANSDUCERS ARRANGED IN STAGGERED ORDER | 2015 |
|
RU2691926C2 |
| ULTRASOUND TRANSDUCER DEVICE AND METHOD OF MANUFACTURING SAME | 2012 |
|
RU2607720C2 |
| PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH PLUG | 2012 |
|
RU2595800C2 |
| PRE-COMPRESSED CELL OF CAPACITANCE MICRO-PROCESSED CONVERTER WITH STRESSED LAYER | 2012 |
|
RU2603518C2 |
| PRELIMINARY PRESSED-IN CAPACITIVE TRANSDUCER CELL, PRODUCED BY MICRO PROCESSING, WITH PRESSED-IN RING-SHAPED AREA | 2012 |
|
RU2609917C2 |
| SMART ULTRASOUND SYSTEM | 2018 |
|
RU2759235C2 |
| CATHETER COMPRISING CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS WITH ADJUSTABLE FOCUS | 2011 |
|
RU2594429C2 |
| ULTRASONIC CONVERTER AND METHOD OF CONTROLLING IT | 2018 |
|
RU2769757C2 |
| TEMPERATURE COMPENSATION DEVICE CMUT | 2012 |
|
RU2590938C2 |
| SEMICONDUCTOR PLATE AND METHOD OF ITS MANUFACTURE | 2013 |
|
RU2627282C2 |
