FIELD: chemistry.
SUBSTANCE: method for manufacturing the epitaxial structure includes providing a substrate and a heterojunction package on the first substrate side and forming a LED package on GaN on the second substrate side . The heterojunction package includes an undoped layer of gallium nitride (GaN) and a doped layer of aluminum gallium nitride (AlGaN) on the undoped layer of GaN. The LED package on GaN includes a layer of GaN n-type over the substrate, a structure on GaN / nitride gallium indium (InGaN) with the multiple quantum wells (MQW) on the top layer of GaN n-type, a layer of AlGaN p-type on the top structure on GaN / InGaN n-type with the MQWs and a layer of GaN p-type on the top layer of AlGaN p-type. The heterojunction package contains one or more device associated with the LED package. These one or more device includes one or more of the field-effect transistor on heterojunction (HTEF) AlGaN / GaN and Schottky diode on AlGaN / GaN. At least, one of these devices is connected to the LED package on GaN.
EFFECT: quality improvement.
15 cl, 7 dwg
Title | Year | Author | Number |
---|---|---|---|
HEAVY-DUTY SHF SWITCH | 2014 |
|
RU2574810C2 |
PSEUDOMORPHIC SHF SWITCH | 2014 |
|
RU2574809C2 |
HEAVY-DUTY PSEUDOMORPHIC SHF SWITCH | 2014 |
|
RU2574808C2 |
UHF POWER SWITCH | 2014 |
|
RU2563533C2 |
METHOD FOR MANUFACTURE OF POWERFUL SHF TRANSISTOR | 2013 |
|
RU2534442C1 |
SEMICONDUCTOR DEVICE AND METHOD OF ITS MANUFACTURING | 2012 |
|
RU2507634C1 |
HETEROSTRUCTURAL FIELD-EFFECT TRANSISTOR BASED ON GALLIUM NITRIDE WITH IMPROVED STABILITY OF THE CURRENT-VOLTAGE CHARACTERISTIC TO IONIZING RADIATION | 2016 |
|
RU2646529C1 |
POWERFUL MICROWAVE FIELD EFFECT TRANSISTOR BASED ON A SEMICONDUCTOR HETEROSTRUCTURE BASED ON GALLIUM NITRIDE | 2021 |
|
RU2782307C1 |
NITRIDE SEMICONDUTOR ULTRAVIOLET LIGHT-EMITTING ELEMENT | 2015 |
|
RU2676178C1 |
LIGHT EMITTING DIODE ON SILICON SUBSTRATE | 2021 |
|
RU2755933C1 |
Authors
Dates
2017-04-04—Published
2013-02-28—Filed