FIELD: semiconductor light-emitting devices.
SUBSTANCE: invention relates to the field of semiconductor light-emitting devices, namely to light-emitting diodes. The light-emitting diode contains a silicon substrate with a silicon carbide layer deposited on it, on which layers of a light-emitting structure are formed, and is equipped with current-carrying contacts. According to the invention, at the interface between silicon and silicon carbide, a decompressed layer is formed in silicon with dead-end pores that do not contain embedded silicon carbide material and provide an increase in light reflection from the substrate and its scattering. The light-emitting structure formed on the silicon carbide layer contains a buffer layer, n-type conductivity layers, an active region, and p-type conductivity layers. These layers are formed from III-nitride materials.
EFFECT: invention provides increase in quantum yield of light-emitting diodes by reducing absorption and increasing reflection and scattering of light at the substrate/light-emitting heterostructure interface.
4 cl, 3 dwg
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Authors
Dates
2021-09-23—Published
2021-02-01—Filed