FIELD: electricity.
SUBSTANCE: device comprises a cylindrical cavity formed in which the outer cylindrical wall surrounding the cavity resonator, which has a substantially rotationally symmetrical shape with respect to the cylindrical axis, the cavity also formed in portions of the side walls bounding the resonator cavity in opposing directions along the cylinder axis. Also, the device includes a microwave waveguide passing through the outer cylindrical wall of the cavity resonator. The length of the resonator cavity in the cylindrical direction varies as a function of the radial distance to the cylindrical axis of the cavity also comprises an annular element forming at least partially a lateral surface of said cavity in the cylindrical direction.
EFFECT: cavity is more closely coordinated with the plasma, thereby reducing the likelihood of arcing.
8 cl, 6 dwg
