FIELD: chemistry.
SUBSTANCE: said source comprises an attachable initial product configured to disconnect, the first connection portion configured to connect the initial product cartridge to the source of the initial product and detach from it, and the second connection portion for connecting the source of the initial product to the deposition reactor device and detachment from it. The initial product cartridge for the above source of the initial product, removably connectable, comprises an initial product chamber, an initial product storage tank for the starting material, a connection part for loading and unloading the initial product tank, and a valve for isolating the gas space of the said chamber from the output pipe of the initial product source. The said chamber has a connecting part with a neck for disassembling the cartridge of the initial product for cleaning. The raw material reservoir has a filter located on top of the said tank, preventing the exit of a solid initial product or powder particles from the tank.
EFFECT: preventing the condensation of the initial product vapour in the said source, preventing film formation on solid surface of the initial product.
11 cl, 22 dwg, 3 ex
