DEVICE AND METHOD FOR DEPRIVATION REACTORS Russian patent published in 2017 - IPC C23C16/455 C23C16/54 

FIELD: chemistry.

SUBSTANCE: device comprises a source of the initial product for depositing the material on the heated substrate in the precipitation reactor by successive self-saturated surface reactions and a pulsating valve embedded in the source of the initial product and configured to control the steam supply from the source of the initial product to the reaction chamber contained in the reactor, in which the substrate is placed. The device is configured to pass a non-reactive gas through the pulsating valve or through the inlet valve of the non-reactive gas source to the initial product source cartridge, with the possibility of raising the pressure and facilitating the subsequent mixture flow of the initial product vapor and the non-reactive gas to the reaction chamber. The said method is carried out by using the said device.

EFFECT: preventing the condensation of the initial product vapor in the source of the initial product.

12 cl, 22 dwg, 3 ex