FIELD: electricity.
SUBSTANCE: protective screen for electrode of plasma-chemical deposition reactor, which is made of metal, is 10 to 1000 micrometres thick with overall dimensions corresponding to the dimensions of the electrode of plasma-chemical reactor and having holes in the locations of the holes on the electrode of plasma-chemical deposition reactor. In particular embodiment of the invention, the said screen comprises an additional protective coating made of silicon nitride or silicon carbide or aluminium oxide, or nickel-plated to increase wear resistance or to enhance chemical resistance. The screen can be made from a solid metal sheet or from individual metal composite elements.
EFFECT: reduction of electrode wear of the plasma-chemical deposition reactor.
5 cl, 2 dwg, 1 ex
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