METHOD OF MANUFACTURING A PHOTOPULATOR WITH NANOSTRUCTURAL ADVANCED COATING Russian patent published in 2018 - IPC H01L31/18 

FIELD: power engineering.

SUBSTANCE: invention relates to solar energy, namely to methods of making photoconverters on GaInP/Ga(In)As/Ge three-stage epitaxial structures grown on a germanium substrate. Method for manufacturing a photoconverter with a nanostructured antireflection coating includes the creation on a germanium substrate with a three-cascade structure of epitaxial layers of face and rear contacts based on silver; performance of mesa-isolation; annealing of contacts; opening of the optical window by etching; applying an antireflection coating containing TiO₂ and Al₂O₃ layers, by electron beam deposition; disk cutting performance of epitaxial structure; rectification of the photo-converter by cooling in nitrogen vapors; after contact annealing, rectification by cooling in the nitrogen vapor of the metallized substrate; performance of disk cutting of epitaxial structure; further, the optical window is opened by etching; antireflection coating is applied by successive spraying of layers TiO₂ thickness 5÷35 nm without ion-plasma assisting, TiO₂ thickness 10÷40 nm with ion-plasma assist, Al₂O₃ thickness 70÷80 nm without ion-plasma assist, and then perform the chemical-dynamic etching of the antireflection coating in a solution of tetramethylammonium hydroxide, hydrogen peroxide and water at the following quantitative ratio of components: 1÷1.5 % by weight, 10÷20 % by weight, 89÷78.5 % by weight, respectively.

EFFECT: invention provides an increase in the parameters of the photo-converter by improving the optical properties of the antireflection coating and minimizing the shunting effect of the plasma on the p/n junctions emerging on the mesic surface.

1 cl, 8 dwg