MAGNETRON SPRAYING UNIT FOR DEPOSITING THE FILMS OF SOLID SOLUTIONS FEXTI(1-X)O2 WITHIN THE RANGE OF 0<X<0_6 Russian patent published in 2018 - IPC C23C14/35 C23C14/08 

FIELD: technological processes.

SUBSTANCE: invention relates to the magnetron spraying unit for depositing films of solid solutions Fe_xTi_(1-x)O₂ within the range of 0<x<0.6 on the surface of metals, glasses or ceramics. Mentioned unit contains a target and a cooling plate, the target and the cooling plate being placed in a reactive medium consisting of a plasma-forming gas in the form of argon and a reactive gas in the form of oxygen. Target is rigidly attached to the cooling plate and is made in the form of two metal plates parallel to each other and located on the same axis as the cooling plate. Inner plate is made of iron, and the outer one is made of titanium, while the titanium plate is made with slits in the annular zone of erosion, the slits are located symmetrically with respect to the center of the target.

EFFECT: increased homogeneity of films of solid solutions of two oxides with a homogeneous composition over the entire area of the substrate is ensured, while the chemical composition of this solution can be controlled by means of varying the total area of the slits.

1 cl, 3 dwg, 1 ex