FIELD: electrical engineering.
SUBSTANCE: invention relates to devices for removing metal coatings by cathode sputtering in a vacuum from the outer and inner surfaces of articles. Installation for removing metal coatings comprises a cathode object to be processed in a vacuum chamber, in which an internal anode assembly and an internal shield are arranged and an additional anode assembly, a current source, and a power source. In the vacuum chamber there are installed: an internal cathode unit, additional internal and external screens for collecting sputtered products, an external cathode assembly and screens of an additional anode assembly.
EFFECT: technical result is the possibility of removing metal coatings, as well as cleaning from oxide films, scales, and the like before the coating, from the outer and inner surfaces of the products – the bodies of rotation, both open and closed on the one hand, regardless of the magnetic properties of the metal or alloy of the workpiece and the metal coating.
10 cl, 6 dwg
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