UHF SWITCH WITH ISOLATED ELECTRODES Russian patent published in 2018 - IPC H01P1/15 

FIELD: instrument engineering.

SUBSTANCE: use: to create a new generation of UHF element base and microwave UHF based on graphene. Essence of the invention lies in the fact that the UHF switch is made on graphene, where silicon is used as the substrate, then a layer of silicon oxide (SiO₂), a nano-sized two-dimensional layer of graphene, which serves as the lower plate of the capacitor, on top of which is applied an insulator containing an amorphous layer of alumina (Al₂O₃), an amorphous layer of a dielectric with a high dielectric constant, for example, hafnium dioxide (HfO₂), and a re-amorphous layer of alumina (Al₂O₃), over the dielectric are placed metal electrodes of strip form, which form the upper plate of the capacitor, the switch comprising two capacitors forming double HF keys.

EFFECT: technical result: providing the possibility of reducing the thermal resistance, increasing the input power level, increasing the switching speed, increasing reliability, and radiation resistance level.

1 cl, 3 dwg