METHOD OF APPLYING PROTECTIVE COATINGS AND DEVICE FOR ITS IMPLEMENTATION Russian patent published in 2019 - IPC C23C14/35 

FIELD: aviation equipment.

SUBSTANCE: invention relates to application of protective coatings. It can be used for production of ceramic layer of heat-protective coatings on aircraft engineering items, mainly on working and nozzle blades of turbines out of heat-resistant foundry alloys. Device for application of coatings by magnetron sputtering method comprises vacuum chamber with opposite planar magnetron sources of spraying, mechanism of rotation and movement of processed items, gas supply system, heating and ion cleaning system, pumping system, recirculating water-cooling system and power supply system with control computer. Vacuum chamber is divided by gates into loading section, at least one sputtering compartment and unloading compartment. Loading compartment comprises a heating system, an inert gas supply system, a system for ion cleaning of the processed articles and a mechanism for rotating and moving articles. In the sputtering compartment there is at least one pair of opposed planar magnetron sprinkling sources and a system for feeding inert and reactive gas. Mechanism of goods rotation and movement provides movement of processed items along the above compartments. Coating is applied at discharge voltage of 450–550 V and oxygen flow rate of 5–8 l/h.

EFFECT: higher uniformity of coating thickness and higher efficiency of sputtering process.

5 cl, 2 dwg, 2 ex