FIELD: gas analysis.
SUBSTANCE: invention relates to the field of gas analysis, in particular to detection devices used to register and measure the content of nitrogen dioxide microimpurities. The invention can be used in ecology. According to the invention, a semiconductor nitrogen dioxide sensor is proposed, consisting of a semiconductor base made in the form of a polycrystalline film of a solid solution of the composition (InAs)0.06(CdTe)0.94, which is deposited on a non-conductive substrate.
EFFECT: invention, with a significant simplification of the technology for manufacturing a nitrogen dioxide sensor, makes it possible to determine the content of nitrogen dioxide with a sensitivity that is several times higher than the sensitivity of known sensors.
1 cl, 1 tbl, 2 dwg
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|
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SEMI-CONDUCTOR GAS ANALYSER OF CARBON MONOXIDE | 2014 |
|
RU2548049C1 |
Authors
Dates
2022-06-21—Published
2021-10-05—Filed