FIELD: gas analysis.
SUBSTANCE: invention relates to the field of gas analysis, in particular to detecting devices used for recording and measuring the content of nitrogen dioxide trace impurities. The invention can be used in ecology. A semiconductor nitrogen dioxide sensor is proposed, consisting of a semiconductor base made in the form of a polycrystalline solid solution film of the composition (InAs)0.84(ZnS)0.16, which is deposited on a non-conductive substrate.
EFFECT: sensor according to the invention makes it possible, with a significant simplification of its manufacturing technology, to determine the content of nitrogen dioxide with sensitivity several times higher than the sensitivity of known sensors.
1 cl, 1 tbl, 2 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| NITROGEN DIOXIDE GAS ANALYZER | 2019 |
|
RU2724290C1 |
| SOLID STATE NITROGEN DIOXIDE SENSOR | 2021 |
|
RU2774643C1 |
| SEMICONDUCTOR NITROGEN DIOXIDE SENSOR | 2020 |
|
RU2750854C1 |
| SEMICONDUCTOR NITROGEN DIOXIDE SENSOR | 2019 |
|
RU2697920C1 |
| SEMICONDUCTOR NITROGEN DIOXIDE ANALYSER | 2014 |
|
RU2561019C1 |
| SEMICONDUCTOR GAS ANALYSER | 2013 |
|
RU2526226C1 |
| SEMI-CONDUCTOR GAS ANALYSER OF CARBON MONOXIDE | 2014 |
|
RU2548049C1 |
| SEMICONDUCTOR GAS ANALYZER OF CARBON OXIDE | 2017 |
|
RU2666576C1 |
| CARBON MONOXIDE SENSOR | 2020 |
|
RU2733799C1 |
| SEMICONDUCTOR SENSOR OF CARBON OXIDE | 2019 |
|
RU2739146C1 |
