FIELD: measurement.
SUBSTANCE: invention relates to gas analysis, in particular to detecting devices used for recording and measuring content of nitrogen impurities. Semiconductor sensor of nitrogen dioxide containing a semiconductor base applied on a non-conducting substrate differs by the fact that the semiconductor base is made of polycrystalline film of the solid solution (InAs)0.015(ZnS)0.985.
EFFECT: high sensitivity and manufacturability of the sensor.
1 cl, 2 dwg, 1 tbl
| Title | Year | Author | Number |
|---|---|---|---|
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|
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|
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|
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|
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| CARBON MONOXIDE SENSOR | 2020 |
|
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|
RU2739146C1 |
