METHOD OF MANUFACTURING A GASB-BASED PHOTOELECTRIC CONVERTER Russian patent published in 2019 - IPC H01L31/18 

FIELD: physics.

SUBSTANCE: invention relates to methods of making photoelectric converters based on GaSb, used in solar cells, thermophotovoltaic generators, in systems with splitting of solar radiation spectrum, in converters of laser radiation. In all listed cases, photocells efficiently operating at high densities of incident radiation are used. Method of making a photoelectric converter involves depositing a dielectric mask on the n-GaSb substrate and performing the first diffusion of zinc into the mask windows. Then high-alloy defective part of formed layer p-GaSb is removed by means of anode oxidation and further etching of oxide in hydrochloric acid. Dielectric mask is formed with windows for zinc diffusion into contact areas of the structure and anode oxidation of these regions is carried out. Second independent diffusion of zinc is carried out through the layer of anode oxide and the p-layer formed on the back surface of the substrate is formed. Rear and front metal contacts are deposited and antireflection coating is applied.

EFFECT: method increases efficiency of PEC operation by increasing photocurrent, PEC idling voltage and reducing flow resistance.

5 cl, 2 ex