APPARATUS FOR TREATING ARTICLES WITH FAST ATOMS Russian patent published in 2020 - IPC H01J27/04 H01J37/34 C23C14/35 

FIELD: machine building.

SUBSTANCE: invention relates to machine building, particularly, to devices for surface treatment of articles with fast atoms in order to obtain articles with improved mechanical and electrophysical characteristics of surface due to implantation of alloying elements into it and formation of submicrocrystalline structure therein. Apparatus for processing articles with fast atoms comprises a working chamber, an anode arranged therein, a discharge power supply connected by a positive pole to the anode and a negative pole to the working chamber, a high-voltage voltage input mounted on the working chamber and a high-voltage pulse generator connected by a positive pole to the working chamber, and a negative pole to the high-voltage input. Device is equipped with installed in the working chamber center a set of plane parallel metal plates connected electrically to each other and to high-voltage input, as well as enclosing plane-parallel plates with metal screen electrically connected to working chamber.

EFFECT: higher quality of treated articles.

1 cl, 2 dwg