MONOCRYSTALLINE GERMANIUM SUBSTRATE WITH THIN SURFACE LAYER OF POROUS GERMANIUM Russian patent published in 2020 - IPC C30B29/08 C30B31/22 C23C14/06 C23C14/58 H01L21/02 H01L21/265 H01L31/264 H01M4/04 H01M4/139 H01M4/38 

Abstract RU 2734458 C1

FIELD: materials science.

SUBSTANCE: invention relates to material science associated with porous media, particularly thin surface layers of porous germanium, which are used in the development of anode electrodes of storage lithium batteries, as well as photodetectors and solar cells. Monocrystalline germanium substrate has a thin surface layer of porous germanium formed on a plate of monocrystalline germanium and including an ion-implanted admixture of a transition metal, such as cobalt, chromium or iron.

EFFECT: technical result is that a monocrystalline germanium substrate with a thin surface layer of porous germanium can be created with a given morphology, which is determined by selecting an implanted transition metal ion: cobalt, chromium or iron.

1 cl, 5 dwg, 3 ex

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RU 2 734 458 C1

Authors

Stepanov Andrej Lvovich

Rogov Aleksej Mikhajlovich

Nuzhdin Vladimir Ivanovich

Valeev Valerij Ferdinandovich

Dates

2020-10-16Published

2019-10-21Filed