ANTIREFLECTION OPTICAL COATING BASED ON POROUS GERMANIUM Russian patent published in 2024 - IPC H01L21/33 H01L21/18 H01L31/264 C30B29/08 C30B31/22 

FIELD: optics; optoelectronics.

SUBSTANCE: invention relates to optical and optoelectronic industries and can be used in making image sensors, photodetectors and solar cells. Antireflection optical coating based on ion-implanted layer of porous germanium on substrate of monocrystalline germanium contains thin surface layer of porous structure of germanium with thickness of 30 nm with ion-implanted impurity of indium. Said layer is made by implantation of monocrystalline germanium substrate with indium ions with energy of 5–50 keV, radiation dose 1.0⋅10¹⁵–1.8⋅10¹⁶ ion/cm² and current density in ion beam 1–15 mcA/cm².

EFFECT: layer made in such a way prevents increased reflection from germanium surfaces.

1 cl, 2 dwg