METHOD OF PRODUCING MONOCRYSTALLINE GERMANIUM SUBSTRATE WITH A THIN SURFACE LAYER OF POROUS GERMANIUM Russian patent published in 2020 - IPC C30B31/22 C30B29/08 C23C14/06 C23C14/58 H01L21/02 H01L21/265 H01L31/264 H01M4/04 H01M4/139 H01M4/38 

FIELD: materials science.

SUBSTANCE: invention relates to material science associated with porous media, particularly thin surface layers of porous germanium, which find application in development of anode electrodes of accumulator lithium batteries, as well as photo detectors and solar cells. Method of producing a monocrystalline germanium substrate with a thin surface layer of porous germanium is that thin layer of porous germanium of given morphology is formed on surface of substrate from monocrystalline germanium by implantation with low-energy 10–90 keV ions of cobalt, chromium or iron at high doses 10¹⁵–5.0·10¹⁷ ion/cm².

EFFECT: invention enables to produce monocrystalline germanium substrates with a thin surface layer of porous germanium of given morphology, which is determined by the type of the implanted cobalt, chromium or iron ion.

1 cl, 5 dwg, 3 ex