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2 805 380

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IPC

H01L31/18(2006-01-01)

C23C14/48(2006-01-01)

B82Y40/00(2011-01-01)

(21) (22)

Application

2023117997, 2023-07-07

(24)

Start date

2023-07-07

(22)

Actual filing date

2023-07-07

(45)

Published

2023-10-16

(72)

Inventor

Stepanov Andrei LvovichNuzhdin Vladimir IvanovichValeev Valerii FerdinandovichKonovalov Dmitrii Aleksandrovich

(73)

Holder

Federalnoe Gosudarstvennoe Biudzhetnoe Uchrezhdenie Nauki Issledovatelskii Tsentr Nauchnyi Tsentr Rossiiskoi Akademii Nauk"

METHOD FOR MANUFACTURING ANTI-REFLECTION OPTICAL COATING BASED ON POROUS GERMANIUM Russian patent published in 2023 - IPC H01L31/18 C23C14/48 B82Y40/00

Abstract RU 2805380 C1

FIELD: optical; optoelectronic industry.

SUBSTANCE: invention relates to individual elements of devices such as image sensors, photodetectors, solar cells, etc., constructed using the semiconductor - germanium. A method for manufacturing an anti-reflection optical coating based on porous germanium includes the formation of an anti-reflection optical coating with a porous germanium structure by implanting a single-crystal germanium substrate with indium ions with an energy of 5-50 keV, radiation dose 1.0⋅10¹⁵ –1.0⋅10¹⁶ ions/cm² and the current density in the ion beam is 1-15 mcA/cm².

EFFECT: possibility of forming a thin-layer anti-reflection optical coating with a porous germanium structure.

1 cl, 2 dwg

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RU 2 805 380 C1

Authors

Stepanov Andrei Lvovich

Nuzhdin Vladimir Ivanovich

Valeev Valerii Ferdinandovich

Konovalov Dmitrii Aleksandrovich

Dates

2023-10-16—Published

2023-07-07—Filed