FIELD: non-ferrous metallurgy equipment.
SUBSTANCE: invention relates to equipment for growing monocrystals. Device 10 for producing monocrystals β-Ga2O3 or LiTaO3 in an oxidizing atmosphere contains base 12, heat-resistant cylindrical furnace body 14 placed above base 12, cover 16a, or 16b, or 16c covering furnace body 14, heater 20 placed inside furnace body 14, high-frequency winding 22 heating heater 20 due to high-frequency induction heating, and a crucible heated by heater 20, and heater 20 contains a Pt-Rh alloy having a Rh content of 10 to 30 wt % and has a coating of zirconium oxide on the entire surface of the heater.
EFFECT: use of a heater made of a platinum-based alloy with a zirconium coating prevents its oxidative destruction, providing the possibility of repeated use of the heater, and also prevents the dissolution of the product of oxidative destruction in the crystal, allowing to obtain single crystals β-Ga2O3 and LiTaO3 of high quality.
4 cl, 14 dwg, 1 ex
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Authors
Dates
2021-06-17—Published
2018-03-01—Filed