MOVING SLIDE GATE FOR FORMING THIN FILMS OF VARIABLE THICKNESS PRODUCED BY VACUUM DEPOSITION METHOD Russian patent published in 2021 - IPC C23C14/54 

FIELD: engineering.

SUBSTANCE: invention relates to vacuum technology and can be used in applying metal and semiconductor films for coating parts used in products of the electronic, instrument manufacturing and optical industries. The moving slide gate for forming thin films of variable thickness in vacuum deposition units equipped with an input assembly of the mechanism for movement of the moving slide gate and control of the speed of movement thereof inside the vacuum chamber is comprised of a body, guiding skids for movement of the body, an adjustable blade 2 and a calibration insert. The body is made with holes, wherein one of the holes is intended for attaching the reverse movement spring, and the second one is intended for attaching the forward thrust cable. Also made in the body are two through contacting windows. The window 13 is intended for gradually opening the surface of the substrate during the movement of the slide gate. The window 14 is intended for retaining the "witness" surface in a permanently open position.

EFFECT: invention allows producing an article with a variable layer thickness, eliminating the need for multiple deposition of articles with identical composition, but different layer thickness.

1 cl, 6 dwg