MOVABLE GATE OF SUBSTRATE FOR FORMATION OF THIN STEPPED FILMS Russian patent published in 2024 - IPC C23C14/54 C23C14/56 

FIELD: various technological processes.

SUBSTANCE: invention relates to a movable shutter for forming a thin film of variable thickness with a stepped structure or a wedge-like structure in a vacuum sputtering apparatus. Above installation of vacuum spraying is equipped with a unit for input of a mechanism of movement of a movable shutter and control of speed of its movement inside the vacuum chamber. Proposed movable gate contains a body with holes, one of which is intended for fastening of a spring of reverse movement, and the second one – for fastening of a direct traction cable. Adjustable blades made in the form of plates from non-magnetic material and replaceable calibration inserts of adjustable blades are installed on the housing of the movable shutter. Said housing is made with possibility of movement along two guide skids located on opposite sides of container holder, having possibility of arrangement in it of container with two seats for substrates from different materials. In housing of movable shutter there are two through windows for gradual opening of surfaces of substrates during shutter movement.

EFFECT: higher efficiency of film deposition and the possibility of obtaining, in one process cycle, two samples with the same chemical composition of a thin film on substrates from different materials with stepped film structures in two mutually opposite directions.

1 cl, 4 dwg, 1 ex