FIELD: shaping.
SUBSTANCE: invention relates to a method for laser annealing of non-metallic materials and can be used for processing semiconductor, ceramic and glass-like materials. The surface is irradiated with a laser pulse of rectangular temporary shape with the required energy density. The initial laser pulse is divided by a dielectric mirror into two pulses and a time delay of the second pulse is conducted for the duration of the first pulse. The power density in the first pulse is 70% of the power density of the initial laser pulse.
EFFECT: increase in the yield of useful products in the process of laser annealing of non-metallic materials due to the reduction in the thermoelastic stresses and the area of possible spallation fracture of the material.
1 cl, 3 dwg, 1 ex
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