FIELD: instrumentation.
SUBSTANCE: invention relates to the field of optical instrumentation and pertains to a method for manufacturing a fibre-optic temperature sensor based on a Fabry-Pérot silicon optical resonator. The method includes the creation of a mask on the top side of a polished silicon substrate secured by the lower side on the retaining base, etching of the silicon substrate to the entire depth following the mask, resulting in the production of Fabry-Pérot silicon optical resonators of the required shape secured on the retaining base, separation of each Fabry-Pérot optical resonator from the retaining base and connection thereof with the optical fibre. An aluminium layer vacuum-deposited on the lower side of the silicon substrate is used as a retaining base.
EFFECT: simplification of the method and reduction in the resonator manufacturing time.
3 cl, 5 dwg
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