DEVICE FOR THE SYNTHESIS OF THIN FILMS INSIDE THE CHANNELS OF A MICROCHANNEL PLATE Russian patent published in 2022 - IPC C23C16/455 C23C16/52 C23C16/458 H01J43/24 

FIELD: chemistry.

SUBSTANCE: invention relates to the technology of applying uniform thin films by conducting chemical reactions on the surface of substrates, including those with a developed relief, for example, substrates with holes and channels with a large aspect ratio. The device for the synthesis of thin films inside the channels of the microchannel plate (MCP) includes a rectangular reaction chamber 1 with holes 2, 3 in its upper horizontal part for supplying vapors of chemical precursors to the microchannel plate 4, made of inorganic or polymer material with many through channels of micron diameter, and placed at the base of the holder 5, the bottom of which has a round hole, the diameter of which is smaller than the diameter of the microchannel plate 4 placed at the bottom of the holder, the reaction chamber 1 in the vertical part has an opening for the pumping channel 8 connected through the switching valve 9 to the pump to provide vacuum 10 in the reaction chamber 1, while an indicator substrate 6 made of polished silicon in the form of a round plate is installed on the inner base of the reaction chamber 1, the diameter of which is comparable to the outer diameter of the holder 5, installed on the indicator substrate 6 with a gap of 2-5 mm between the surface of the indicator substrate 6 and the microchannel plate 4 placed on the holder 5, and between the indicator substrate 6 on the inner base of the reaction chamber 1, from the side of the hole for the pumping channel 8 in it, at a distance of at least 5 mm, there is a controller substrate 7 made of polished silicon.

EFFECT: increase the uniformity and control of the applied thin layers inside the channels of the microchannel plate due to a system continuous controlled process using the proposed device, which provides two identical substrates with different functions, one of which is an indicator substrate for identifying the spraying process, and the second is a controller substrate that provides control over the quality of spraying.

1 cl, 3 dwg, 1 tbl