FIELD: semiconductor technology.
SUBSTANCE: invention relates to semiconductor technology, to planar laser heterostructures. The separate-confinement laser hetero-structure grown on a GaAs substrate of n-conductivity includes a quantum-dimensional active region, waveguide layers made of a solid solution of AlxGa1-xAs, emitter layers of n-conductivity and p-conductivity adjacent to the waveguide layers and made of a solid solution of Alx⋅ Ga1-x⋅ As. The heterostructure is provided with contact layers of n-conductivity and p-conductivity adjacent to the corresponding emitter layers of n-conductivity and p-conductivity, the waveguide layers contact directly with the quantum-dimensional active region and the emitter layers of n-conductivity and p-conductivity and are made of different thickness and are 2u and y, respectively, where y is within from 0.75 to 0.85 microns, the molar fraction of aluminum x solid solution AlxGa1-xAs in waveguide layers at the boundaries with emitter layers is 0.8xʹ and linearly decreases to 0.5xʹ at the boundaries with the quantum-dimensional active region, and in emitter layers the molar fraction of aluminum xʹ solid solution Alx⋅ Ga1-x⋅ As is in the range from 0.4 to 0.45.
EFFECT: present invention enables to improve the design of the laser heterostructure, to create an additional optical confinement between the emitter and waveguide layers.
1 cl, 1 dwg
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Authors
Dates
2023-01-11—Published
2022-02-21—Filed