METHOD OF FORMING ASTIGMATISM AND HIGHER ORDERS OF ZERNIKE POLYNOMIALS WITH COEFFICIENTS N=M (N≥2) ON SURFACE OF OPTICAL ELEMENTS Russian patent published in 2023 - IPC G02B3/02 B24B13/00 

FIELD: optical instrument making.

SUBSTANCE: invention concerns a method of forming astigmatism and higher orders of Zernike polynomials on the surface of optical elements. The method includes calculating the cross sections that form the ion beam of the diaphragms, calculating the dependence of the rotation speed on the angular position of the part, and rotating the optical part in accordance with the calculated speed behind the calculated diaphragm forming the profile of the ion beam. Processing is performed in two stages. At the first stage, non-axisymmetric processing is performed first calculating the diaphragm corresponding to the non-axisymmetric component of the aspherization profile and the dependence of the rotation speed of the part on its angular position relative to the diaphragm forming the ion beam. At the second stage, axisymmetric processing is performed first calculating the forming diaphragm corresponding to the axisymmetric component of the aspherization profile.

EFFECT: possibility of manufacturing aspherical optical elements with a non-axisymmetric surface profile.

1 cl, 4 dwg