FIELD: plasma equipment.
SUBSTANCE: invention relates to development of gas-discharge plasma generators, and more specifically to creation of wide-aperture plasma sources of ion flows based on gas discharges with a hollow cathode. High-frequency plasma generator on multisection hollow cathode contains grounded vacuum chamber, multisection hollow cathode arranged in vacuum chamber, made with more than one holes and connected to vacuum chamber through dielectric ring, tube inserted into chamber for supply of working gas to chamber. Tubes for supply of alternating voltage simultaneously serve as pipelines for supply of cooling liquid; cooling liquid circulates inside the cathode cavity; cooling tubes of the hollow cathode are connected to the high-frequency generator through metal threaded fittings with a sealing ring made of metal.
EFFECT: increased efficiency of multisectional plasma cathode operation and service life of cathode structure in chemically active media.
1 cl, 4 dwg
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