FIELD: electricity.
SUBSTANCE: invention relates to power semiconductor electronics, namely to pulse high-voltage equipment, and can be used in drift diodes with abrupt recovery of reverse resistance (hereinafter DDAR) as high-speed switches of breaking type for generators of ultra-short voltage pulses. Drift diode with abrupt recovery of reverse resistance based on silicon carbide of 4H polytype includes uniformly doped substrate of n+-type conductivity, on which a gradient-doped p--type conductivity layer and a uniformly doped p+-type conductivity layer are grown, and on p+-type conductivity layer outer side and substrate outer side anode and cathode ohmic contacts are formed, additionally there is a layer with uniform doping of n--type conductivity, located between substrate of n+-type conductivity and gradient-doped layer of p--type conductivity. P--type conductivity layer is gradient-doped with aluminium acceptors with an increase in the concentration of the dopant – aluminium in the direction of the p+-layer with a constant concentration gradient throughout the layer. Ratio of thickness of layers of n--type conductivity and p--type conductivity is 1:7.
EFFECT: faster operation.
1 cl, 1 dwg, 1 tbl
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Authors
Dates
2025-03-17—Published
2024-10-03—Filed