PLASMA-FORMING MIXTURE FOR PLASMA CHEMICAL TREATMENT OF PINOUT OF ALUMINIUM AND ITS ALLOYS IN MANUFACTURE OF VERY LARGE-SCALE INTEGRAL SCHEMES Russian patent published in 1996 - IPC

Abstract SU 1814435 A1

FIELD: manufacture of integral schemes. SUBSTANCE: plasma-forming mixture containing sulfur hexafluoride and nitrogen is distinguished with that, in order to increase output of valid schemes due to reducing probability of the pinout corrosion and pollution of interlayer dielectric, mixture is supplemented with oxygen, content of components being the following: 45-55 vol % oxygen, 15-25 vol % sulfur hexafluoride, and nitrogen, the balance. EFFECT: improved quality of produce.

Similar patents SU1814435A1

Title	Year	Author	Number
PROCESS PLANATION OF INTEGRATED CIRCUITS	1992	Bliznetsov V.N. Gushchin O.P. Zheleznov F.K. Trusov A.A. Jachmenev V.V.	RU2024992C1
PROCESS OF PLASMA ETCHING OF CONTACT WINDOWS IN INSULATING AND PASSIVATING LAYERS OF DIELECTRIC BASED ON SILICON	1992	Bliznetsov V.N. Gushchin O.P. Krasnikov G.Ja. Trusov A.A. Khrapova V.V. Jachmenev V.V.	RU2024991C1
PROCESS OF SELECTIVE ETCHING OF SILICON-CONTAINING LAYER IN MULTILAYER STRUCTURES	0	Stasyuk Igor Olegovich Kunitsin Anatolij Viktorovich Fominykh Nikolaj Arkadevich Ivankovskij Maksim Maksimovich Meertal Igor Olegovich Ostapchuk Sergej Aleksandrovich	SU1819356A3
MANUFACTURING PROCESS FOR DOUBLE-LEVEL METALLIZED LARGE-SCALE INTEGRATED CIRCUITS	1991	Krasnozhon A.I. Frolov V.V. Khvorov L.I.	RU2022407C1
PROCESS OF MANUFACTURE OF TWO-LEVEL COATING	1991	Medvedev N.M. Khvorov L.I.	RU2025825C1
MANUFACTURING PROCESS FOR MULTILEVEL INTERCONNECTIONS OF INTEGRATED CIRCUITS	1991	Bychok E.A. Makarova L.S. Nizhnikova N.V. Stanovskij V.V. Terekhov A.M.	SU1814434A1
FORMING OF MULTILEVEL COPPER INTERCONNECTIONS OF MICRO IC WITH APPLICATION OF TUNGSTEN RIGID MASK	2013	Danila Andrej Vladimirovich Gushchin Oleg Pavlovich Krasnikov Gennadij Jakovlevich Baklanov Mikhail Rodionovich Gvozdev Vladimir Aleksandrovich Burjakova Tat'Jana Leont'Evna Ignatov Pavel Viktorovich Averkin Sergej Nikolaevich Janovich Sergej Igorevich Tjurin Igor' Alekseevich	RU2523064C1
COMPONENT INTERCONNECTION	1990	Turtsevich A.S. Dovnar N.A. Rodin G.F. Kozachonok G.M. Malyshev V.S.	SU1825236A1
PROCESS OF PLASMA-CHEMICAL PICKLING OF SILICON-CARRYING MATERIALS	1997	Red'Kin S.V. Aristov V.V.	RU2141701C1
PROCESS OF MANUFACTURE OF MIS LARGE-SCALE INTEGRATED CIRCUITS	1987	Achkasov V.N. Vakhtel' V.M. Gitlin V.R. Ivakin A.N. Kadmenskij S.G. Levin M.N. Ostroukhov S.S.	RU1519452C

SU 1 814 435 A1

Authors

Rodin G.F.

Turtsevich A.S.

Tsybul'Ko I.A.

Koreshkov G.A.

Sasnovskij V.A.

Dates

1996-07-27—Published

1991-04-05—Filed