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2 009 573

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Application

4929635/25, 1991-04-22

(22)

Actual filing date

1991-04-22

(45)

Published

1994-03-15

(72)

Inventor

Zajtsev N.A.Krasnikov G.Ja.Liskin L.A.Medvedev A.I.Janitskij V.K.

(73)

Holder

Nauchno-Issledovatel'Skij Institut Molekuljarnoj Ehlektroniki

METHOD OF SILICON MONOCRYSTALLINE PLATES APPLICABILITY DETERMINING FOR SEMICONDUCTORS MANUFACTURING Russian patent published in 1994 - IPC

Abstract RU 2009573 C1

FIELD: electronics, integrated microcircuits manufacturing. SUBSTANCE: method includes monocrystalline plates illuminating by ultraviolet radiation at waves length band 0,5-5,0 μmm and plates material transparency coefficient determining for this radiation. Semiconductors production quality factor is determining on the basis of correlation relation studying between transparency coefficient value for ultraviolet radiation and microcircuits suitability factor made preliminary. EFFECT: better possibility for workable microcircuits amount forecasting. 1 tb

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RU 2 009 573 C1

Authors

Zajtsev N.A.

Krasnikov G.Ja.

Liskin L.A.

Medvedev A.I.

Janitskij V.K.

Dates

1994-03-15—Published

1991-04-22—Filed

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