FIELD: semiconductor devices. SUBSTANCE: semiconductor heteroepitaxial structure is positioned on semiconductor monocrystalline substrate with heteroepitaxial layer of n-type and disturbed layer on separation boundary. Heteroepitaxial layer has n+ layers. First one with thickness equal to that of disturbed layer is located on boundary of separation with substrate, second one is manufactured tunnel-opaque for minority carriers and is placed at distance bigger than length of Debye screening from first layer. Heteroepitaxial layer is supplemented with high-doped p+ layer which thickness is bigger doubled length of Debye screening and which is arranged between first and second high-doped layers. EFFECT: enhanced operational stability. 2 dwg
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Authors
Dates
1995-09-27—Published
1993-03-10—Filed